Vacuum Transfer Robot - List of Manufacturers, Suppliers, Companies and Products

TSVCR3060N (2-inch wafer transport)

It contributes to the miniaturization of vacuum transfer chambers.

Industry's smallest class, enabling miniaturization of equipment. Our standard vacuum robot: 65% footprint (φ95mm), 75% reduction in volume. Arbitrary reach distance can be set by combining arms.

• Company：ジェーイーエル
• Price：Other

• Other semiconductor manufacturing equipment